ATS 500
ATS 500 is built for advanced research and pilot production in electronics and optical components. High throughput vacuum systems support a wide range of deposition techniques, including ion beam assistance and lift-off. Loadlocks, sample heating and sample transfer systems are available.
Features
- Thermal, e-beam or sputtering
- Turbo or cryo pumping
- Touch-screen PC control
- Lift-off processing
- Ion source processing
- 500mm diameter chambers up to 900mm tall
- Load locks and handler options
- Manual to full process control options
- Compact footprint
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