Spectroscopy

Electron Spectroscopy for Chemical Analysis under Environmental Conditions (EnviroESCA) overcomes the barriers of standard XPS systems by enabling analyses at pressures far above UHV.

In Near Ambient Pressure XPS (NAP-XPS) systems, samples can be characterized in operando with pressures up to 100 mbar. 

XPS/UPS systems are standard tools for the characterisation of the chemical composition and the electronic structure of the surfaces of solids. 

SPECS EnviroMETROS FAB is the perfect routine analysis metrology tool for wafers up to 200 mm (8″) or up to 300 mm (12″); with possibility to integrate to wafer handler systems, clean room and SEMI standard compliant.

SPECS EnviroMETROS LAB provides the perfect routine or research XPS analysis for any sample for surface as well as non-destructive depth profiling with a variable information depth photoelectron spectrometer.

Angle-Resolved Photoelectron Spectroscopy (ARPES) detects the energy and angle distribution of photoelectrons to determine the electronic structure of solids.