Vacuum Pumps
We provide maintenance service and repair for scroll pumps, rotary vane pumps and membrane pumps. Rebuild is also possible for ion pumps and scroll pumps.
Diaphragm Pump
Roughing pumps - From Atmosphere to 10-3 torr
Roughing pumps are used to initially evacuate a vacuum system, as a first stage prior to the turbomolecular pump taking over to achieve high vacuum or ultrahigh vacuum (UHV). The vacuum range is typically to 1×10-3 torr (0.1 Pa). Dry pumps are preferred over oil pumps for UHV applications for fear of oil vapour contaminations.
Turbomolecular Pumps
Titanium Sublimation Pumps
Titanium Sublimation Pumps (TSP) are used to remove residual gases in ultra-high vacuum systems. TSPs operate by heating a titanium filament and subliming titanium molecules onto cooled surfaces. Sublimed titanium molecules then chemically absorb hydrogen, oxygen, nitrogen and active gases and makes the vacuum quality higher. This effect is generated periodically (intermittent pumping) to reach very low pressures and enhance the base vacuum. TSPs can operate from 10-5 to 10-12 mbar. Combined with an ion pump, the TSP allows for low ultimate pressures in a shorter amount of time.
TSP Controller
- automatic or manual filament selection
- degassing function for filaments of TSP
- manual input function
- internal time control
Ion Pumps
Ion pump is used for generating ultrahigh or extreme-high vacuum. The structure is simple; an electric field is applied to a cell consisting of an anode and a cathode, so there are neither moving parts nor sounds and vibration.
- Generation of primary electrons: Magnets outside the vacuum, generate a strong magnetic field, which guides and contains electrons within the circular anode rings.
- Spiral orbit of the primary electrons: When high voltage is applied to the element assembly, electrons are pulled into the anode tube assembly where they spin and generates plasma. The plasma is trapped by the high magnetic field.
- Generation of secondary electrons and ions: As gases move into the anode assembly, electrons strike the gas molecules. This collision removes electrons from the gas molecule’s valence shell, and changes the gas molecule into a positive ion.
- Ions collide with the cathode and eject titanium atoms: The positive ion is forced out of the anode tube by the high voltage field at a high velocity towards the cathode plate and sputter the cathode material (titanium).
- Titanium atoms adsorb active gas molecules: The titanium deposited at other locations acts as a getter film and adsorbs reactive gas particles (e.g., nitrogen, oxygen, hydrogen).
- Ions trapped in the cathode: The energy of the ionized gas particles is not only high enough to sputter the cathode material but also to let the impinging ions penetrate deeply into the cathode material (ion implantation).
Non-Evaporable Getter Pumps (NEG Pumps)
The NEG pump operates with a non-evaporable, compact getter material, the structure of which is porous at the atomic level so that it can take up large quantities of gas. The gas molecules adsorbed on the surface of the getter material, diffuse rapidly inside the material thereby making place for more gas molecules to impinge on the surface.
The NEG pump contains a heating element which is used to heat the getter material to an optimum temperature (activated). After the activation, the pump removes gases at room temperature without any need for electric power to operate.
Rechargeable battery-powered controller
Rechargeable battery-powered controller designed specifically for ion pumps, equipped with a built-in pressure display. Calibrated to showcase vacuum levels in mbar for SAES™ NexTorr pumps (D100-5, D200-5, D300-5, and D500-5), it includes an acoustic alarm signalling low battery levels.
It also features a Pt 100 sensor input, facilitating temperature measurements for LN2-cooled sample stages in Cryo-UHV-suitcases or for monitoring bakeout temperature. Offering approximately ~45 hours of continuous battery-driven operation for the ion aspect of the pump, note that the NEG part of the pump operates without power.
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