ALD/CVD Precursors
More than 800+ high purity compounds, including:
- Acetates
- Acetylacetonates
- Alkenes/Dienes
- Carbonyls
- Cyclopentadiene derivatives
- Metal-alkyl and -hydride bonds
- Noble metals
- Pyrophorics
Commonl used precursors available includes:
- Trimethylaluminum (TMA)
- Tris(dimethylamino)antimony(III)
- Bis(diethylamino)silane (BDEAS)
- Diethylzinc (DEZ)
- Tetrakis(dimethylamino)zirconium (TDMAZ)
- Tetrakis(dimethylamino)hafnium (TDMAH)
- (t-Butylimido)tris(diethylamino) niobium(V) (TBTDEN)
- Tris(dimethylamino)silane (3DMAS)
- Tetrakis(Dimethylamino)Titanium(IV) (TDMAT)
- Trimethylindium
- Tetrakis(Dimethyamino)Tin(IV)
- Copper Acetylacetone
Packaging
Borosilicate glass ampules
- Hermetically-sealed and transparent.
- Product may be repackaged if customer has appropriate facilities to safely handle and maintain the integrity of the materials.
- Ampule sizes are customized to meet each customer’s requirements.
316L stainless steel vessels
- DOT-certified with electropolished interiors.
- Standard configuration with VCR connections.
- Valve options may be customized based upon intended service conditions.
- Available in a range of sizes, from small evaluation samples to vessels sized for manufacturing.
- Ready to connect to the customer’s delivery system upon receipt.
Get in touch
Let us know how we can help.
