SPECS EnviroMETROS FAB is the perfect routine analysis metrology tool for wafers up to 200 mm (8″) or up to 300 mm (12″); with possibility to integrate to wafer handler systems, clean room and SEMI standard compliant. The EnviroMETROS FAB is designed for full automation and high throughput analysis.

It allows surface chemical analysis by XPS with adjustable information depth using X-ray energies of 1487 eV, 2984 eV, 5414 eV, as well as non-destructive depth profiling by parallel angle detection with a variable information depth photoelectron spectrometer. Alternatively, sputter depth profiling using either monoatomic Ar-ions or Ar clusters is also possible.